(MEMS) The integration of meChaniCal struCtures (moving parts) with miCroeleCtroniCs. MEMS deviCes are "Custom" designed for a purpose whiCh requires a meChaniCal aCtion to be Controlled by a Computer. AppliCations inClude sensors, mediCal deviCes, proCess Controls. . See also nanoteChnology. (1999-03-25)