(MEMS) The iNtegratioN of mechaNical structures (moviNg parts) with microelectroNics. MEMS devices are "custom" desigNed for a purpose which requires a mechaNical actioN to be coNtrolled by a computer. ApplicatioNs iNclude seNsors, medical devices, process coNtrols. . See also NaNotechNology. (1999-03-25)